atlas用户手册

【实例简介】
silvaco-atlas用户使用手册,全英文。
The information contained in this document is subject to change without notice SILVACO International maKEs No WarrantY of aNY KINd WiTh regard to THIS MATERIAL INCLUDING BUT NOT LIMITED TO. THE IMPLIED WARRANTY OF FITNESS FOR A PARTICULAR PURPOSE SILVACo International inc. shall not be held liable for errors contained herein or for incidental or consequential damages in connection with the furnishing, performance, or use of this material This document contains proprietary information, which is protected by copyright laws of the United States. All rights are reserved. No part of this document may be photocopied, reproduced, or translated into another language without the prior written consent of SILvaco INTERNATIONAL Simulation Standard, TCAD Driven CAD, Virtual Wafer Fab, Analog Alliance, Legacy, ATHENA. ATLAS. MERCURY VICTORY. VYPER. ANALOG EXPRESS. RESILIENCE DISCOVERY, CELEBRITY, Manufacturing Tools, Automation Tools, Interactive Tools Tony Plot, Tony Plot3D, Deck Build, DevEdit, DevEdit3D, Interpreter, ATHENA Interpreter, ATLAS Interpreter, Circuit Optimizer, Mask views, PSTATS, SSuprem3, SSuprem4, Elite Optolith, Flash, Silicides, MC Depo/Etch, MC Implant, s-Pisces, Blaze/Blazc3D, Devicc3D TFT2D/3D, Ferro, SiGe, SiC, Laser, VCSELS, Quantum2D/3D, Luminous 2D/3D, Giga2D/3D, MixedModc2D/3D, FastBlaze, FastLargeSignal, FastMixedMode, FastGiga, Fastnoise Mocasim, Spirit, Beacon, Frontier, Clarity, Zenith, Vision, Radiant, Twin Sim, UTMOST UTMOST IL UTMOST IIL. UTMOSTIV PROMOST SPAYN. UTMOST IV Measure. UTMOST IV Fit, UTMOST IV Spice Modeling, SmartStats, SDDL, Smartspice, Fastspice, Twister, Blast MixSim, Smartlib, Testchip, Promost-Rel, RelStats, Rellib, Harm, Ranger, Ranger3D Nomad QUEST, EXACT, CLEVER, STELLAR, HIPEX-net, HIPEX-r, HIPEX-c, HIPEX-rc, HIPEX-crc EM, Power, IR, SI, Timing, SN, Clock, Scholar, Expert, Savage, Scout, Dragon, Maverick Guardian, Envoy, LISA, Expert views and sflM are trademarks of silvaco International All other trademarks mentioned in this manual are the property of their respective owners o1990,1991,1992,1993,1994,1995,1996,1997,1998,2000,2002,2004 by SILVACO International Inc SILVACO International Reader comment sheet We welcome your evaluation of this manual. Your comments and suggestions help us to improve our publications. If you have any responses to the questions below, please let us know. Please write your bservations down and send your complaints, bug reports, suggestions or comments to the e-mail address listed below Is this manual technically accurate? Are the concepts and wording easy to understand Is the size of this manual convenient for you? Is the manuals arrangement convenient for you? Do you consider this manual to be easily readable? Please add any additional relevant comments and fax your comments to SILVACO International Attention Technical publications 4701 Patrick Henry Drive, Building 1 Santa clara Ca 95054 Youcanalsoe-mailusatsupport@silvaco.comorvisitourwebsiteathttp://www.silvaco.com SILVACO International Intended Audience The information presented is based on the assumptions that the reader is(1) familiar with the basic terminology of semiconductor processing and semiconductor device operation, and(2) understands the basic operation of the computer hardware and operating system being employed Introduction atlas is a modular and extensible framework for one. two and three dimensional semiconductor device simulation. It is implemented using modern software engineering practices that promote reliability, maintainability, and extensibility. Products that use the ATLAS Framework meet the device simulation needs of all semiconductor application areas SILVACO International makes no warranty of any kind with regard to this material, including but not limited to, the implied warranty of fitness for a particular purpose SILVACO International shall not be liable for errors contained herein or for incidental or consequential damages in connection with furnishing, performance, or use of this material. This document contains proprietary information protected by copyright. All rights are reserved. no part of this document may be photocopied, reproduced, or translated into another language without the prior written consent of SILVACO International The edition number and the issue date is shown below History Edition 1- July 1.1993 Edition 2-march 1.1994 Edition- June 1. 1994 edition 4-October 30. 1996 Edition 5- April 30, 1997 Edition 6- november 1998 Edition 7-February 2000 edition 8-December 2002 Edition 9- September 2004 SILVACO International If you have difficulties or questions relating to the usage of any Silvaco product, contact the Silvacosupportpersonnelatsupport@silvaco.com When you send us an e-mail message please Explain the problem or question as fully as possible. Include any input files that you have created and error messages that were generated. Provide us with the version number of atlas the version numbers of the vwF interactive TOOLS that you are using, and the details of the hardware platform on which the problem was encountered Include your company affiliation, business telephone number, and fax number You will be contacted promptly and your problem will be resolved as quickly as possible Your feedback will help us further develop and improve ATLAS. Please send your comments to our e-mail address SILVACO International Style Conventions Font style/Convention Description Example This represents a list of items or. Bullet a terms Bullet b Bullet c 1. This represents a set of directions to To open a door 2 perform an action 1. Unlock the door by inserting 3. the key into keyhole 2. Turn key counter-clockwise 3. Pull out the key from the eyehole 4. Grab the doorknob and turn ockwise and pull. This represents a sequence of menu File-Open options and gui buttons to perform an action This re ents the parameters, and variables syntax New Century Schoolbook This represents the menu options and File Bold buttons in the gui New Cenlury Schoolbook This represents the equations aoc=rye Italics This represents the additional Note important information. Note: Make sure you save often while run ning an experiment NEW CENTURY SCHOOLBOOK This represents the names of the ATHENA. ATLAS. EXpERT IN SMALL CAPS SILVACO/SIMUCAD AUTOMATION GATEWAY, HIPEX, SMARTSPICE DESIGN Products STELLAR and UTMOST. SILVACO International This page is intentionally left blank VIl SILVACO International Table of contents Chapter 1 Introduction 11: ATLAS OVerview,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, 1111 1.2: Features And Capabilities of ATLAS 12 1.2.1: Comprehensive Set of Models 1-2 1.2.2: Fully Integrated Capabilities 1-2 1.2.3: Sophisticated Numerical Implementation 12 1.3: Using ATLAS With Other Silvaco Software 13 1.4: The Nature Of Physically- Based simulation.……………∴…………………………∴…1-4 Chapter 2 Getting Started with ATLAS 题■■ ■■■■■■■■■■ 2-1 2.1: Overview III....II 2-1 2.2: ATLAS Inputs and Outputs. ,∴∴,,,,∴∴∴2-2 23: Modes of operation∴∴ ,,,,,∴∴,2-3 2.3.1: Interactive Mode with deck Build 2-3 2.3.2: Batch Mode With deck Build 2.3.3: No Windows batch Mode With Deck Build 2-3 2.3.4: Running ATLAS inside Deckbuild 2-4 2.3.5: Batch Mode without deck build .2-4 24: Accessing The Examples∴∴ ■■■_■11■■1道■■ ∴∴∴2-5 2.5: The atlas synta 27 2.5.1 Statements and parameters 2-7 2.5.2. The Order of atlas commands 2-7 2.5.3: The deck Build Command menu 2-8 2.5.4: PISCES-II Quick Start 2-8 26: Defining A Structure...,,,,,,,,,,,,,,,,,2-10 2.6.1: Interface From ATHENA 2-10 2.6.2: Interface From Devedit 2-11 2.6.3: Using The Command language to define a structure ,1 2-11 2.6.4: Automatic Meshing(Auto-meshing) Using The Command Language 2-15 26.5: Moditying Imported Regions∴∴ 222 2.6.6: Remeshing Using The Command Language 2-23 2.6.7: Specifying 3D Structures 2-24 2.6.8: General Comments Regarding Grids 2-25 2.6.9: Maximum Numbers of Nodes, Regions, and electrodes 2-26 2.7: Defining Material Parameters and Models 2.7.1: Specifying Contact Characteristics 2-27 2.7.2 Specifying Material Properties 2-30 2.7.3: Specifying Interface Properties 2-31 2.7.4: Specifying Physical Mode 2-31 2.7.5: Summary Of Physical Models 2-33 2. 8: Choosing numerical Methods.......,.. 11 2-38 2.8.1: Numerical Solution Techniques 2-38 2.9: Obtaining n■■11111 ,,2-42 2.9.1: DC Solutions 2-42 2.9.2: The Importance Of The Initial Guess 243 2.9.3: Small-Signal Ac Solutions 2-45 SILVACO International ATLAS USer's Manual 2.9.4: Transient Solutions 246 2.9.5: Advanced Solution Techniques 2.47 2.9.6: Using Deck Build To Specify SoLvE Statements 249 210: nterpreting The Results∴.… .,,,250 2.10.1: Run-Time Output 250 2.10.2: Log Files 251 2.10.3: Parameter Extraction In DeckBuil 252 2.10.4: Functions In Tony Plot 253 2. 10.5 Solution Files 25 2. 10.6: Technology Specific Issues in ATLaS 256 Chapter 3 Physics 3.1: Basic Semiconductor Equations. 3-1 3.1.1: Poisson 's equation 3- 3.1.2: Carrier Continuity Equations 3.1.3: The Transport Equations 3-2 3.1.4: Displacement Current Equation 34 3.2: Basic Theory of Carrier Statistics ,,,,,,,35 3.2.1: Fermi-Dirac and boltzmann statistics 3-5 3.2.2: Effective Density of States 3-5 3. 2.3 Intrinsic Carrier Concentration ,,,3-6 3.2.4: Evaluation of Fermi-Dirac Integrals 3-7 3.2.5: The Energy Bandgap 3-7 3.2.6: Bandgap Narrowing 3-7 3. 2. 7: Passler's Model for Temperature Dependent Bandgap 3-9 33: Space Charge from Incomplete lonization, Traps, and defects∴………………,310 3.3.1: Incomplete lonization of Impurities 3-10 3.3.2: LoW Temperature Simulations 3-11 3.3.3: Traps and Defects 3-12 3.4: The Energy Balance Transport Model 3-19 3.4.1: The Energy Balance Equations 3-19 3.4.2: Density of States 322 3.4.3: Energy Density Loss Rates 322 3.4.4: Temperature Dependence of Relaxation Times 3-23 3. 4.5: Energy Dependent Mobilities 3.5: Boundary Physics. 3-25 3.5.1: Ohmic Contacts 3-25 3.5.2: Schottky Contacts 3-25 3.5.3: Floating Contacts 329 3.5.4: Current Boundary conditior 3-29 3.5.5: Insulating Contacts 330 3.5.6: Neumann bounday 3-30 3.5.7: Lumped Element Boundaries 3-30 3.5.8: Distributed Contact Resistance 3.5.9: Energy Balance Boundary Conditions 3-32 36: Physical Models∴∴.∴…… 3-34 3.6.1: Mobility Modeling 3-34 3.6.2: Mobility Model Summary 3.6.3: Carrier Generation -Recombination Models 3-63 3.6.4: Impact lonization models 3.6.5 Gate Current Models 380 3.6.6: Device Level Reliability modeling 388 6. 7: The ferroelectric Permittivity mod 389 X SILVACO Internati 【实例截图】
【核心代码】