实例介绍
【实例简介】光学专业专著
Welcome to the SPIE Field Guides—a series of publications
written directly for the practicing engineer or scientist.
Many textbooks and professional reference books cover
optical principles and techniques in depth. The aim of the
Many textbooks and professional reference books cover
optical principles and techniques in depth. The aim of the
SPIE Field Guides is to distill this information, providing
readers with a handy desk or briefcase reference that
provides basic, essential information about optical principles, techniques, or phenomena, including definitions and
descriptions, key equations, illustrations, application
examples, design considerations, and additional resources.
A significant effort will be made to provide a consistent
notation and style between volumes in the series.
Each SPIE Field Guide addresses a major field of optical
science and technology. The concept of these Field Guides
is a format-intensive presentation based on figures and
equations supplemented by concise explanations. In most
cases, this modular approach places a single topic on a
page, and provides full coverage of that topic on that page.
Highlights, insights, and rules of thumb are displayed in
sidebars to the main text. The appendices at the end of
each
each Field Guide provide additional information such as
related material outside the main scope of the volume, key
mathematical relationships, and alternative methods.
While complete in their coverage, the concise presentation
may not be appropriate for those new to the field.
The SPIE Field Guides are intended to be living documents. The modular page-based presentation format
allows them to be updated and expanded. We are
interested in your suggestions for new Field Guide topics
as well as what material should be added to an individual
volume to make these Field Guides more useful to you.
Please contact us at fieldguides@SPIE.org.
【实例截图】
【核心代码】
Glossary of Terms and Acronyms xi
Fundamentals of Light and Interference 1
Basic Assumptions 1
Degrees of Freedom 2
The Meter 3
Electromagnetic Radiation 4
Electric Field 5
Polarization States 6
Complex Polarization 7
Superposition 8
Interference 9
Irradiance 10
Polarization Overlap 11
Fringe Contrast 12
Interferometer Components and Notation 13
More Interferometer Components 14
Polarization-Based Components 15
Waveplates 16
Ghosts, Absorption, and Scatter 17
Michelson’s Interferometer 18
Temporal Coherence 19
Displacement from Phase Change 20
Unwrapping and Folding 21
Basic Interferometry Systems 22
Interferometry Systems 22
Homodyne Interferometer 23
Retroreflector Homodyne Interferometer 24
Homodyne Optical Power Efficiency 25
Polarization-Sensitive Homodyne Interferometer 26
Directional Sensitivity 27
Direction-Sensitive Homodyne Interferometer 28
Homodyne Laser Encoder 29
Heterodyne Interferometry Systems 30
Basic Heterodyne Interferometer 31
Heterodyne Directional Sensitivity 32
Homodyne and Heterodyne Comparison 33
vii
Field Guide to Displacement Measuring Interferometry
Interferometry System Characteristics 35
Unequal Plane Mirror Interferometer 35
Plane Mirror Interferometer (PMI) 36
PMI Variants 37
Beam Walkoff 38
Doppler Velocity 39
Dynamic Range and Acceleration Limitations 40
Laser Sources 41
Optical Power and Laser Modes 42
Zeeman-Stabilized Laser 43
Two-Mode Intensity-Balanced Laser 44
Heterodyne Frequency Generation 45
Phase Measurements 46
Interference Detection 47
Detection Bandwidth 48
Phase Quadrature Measurements 49
Time Interval Analysis 50
Lock-In Detection 51
Discrete Fourier Transform 52
Special Interferometer Configurations 53
Special Interferometer Configurations 53
Quad-Pass Interferometer 54
Differential Interferometer 55
Coaxial Differential Interferometer 56
Angle Interferometer 57
Straightness Interferometer 58
Refractometry 59
Wavelength Tracking 60
Refractive Index Tracker 61
Multiaxis Systems 62
Multi-DOF Interferometers 63
X-Y-Theta System 64
Tip-Tilt-Z System 65
Interferometer Alignment 66
Setup and Alignment Techniques 66
Commercial Interferometer Alignment 67
Vector Alignment and Breadboard Alignment 68
Table of Contents
viii
Field Guide to Displacement Measuring Interferometry
Beam Fly Height 69
Grid Alignment 70
Normal Mirror Alignment 71
45-deg Mirror Alignment 72
Mirror Steering 73
Beamsplitter Alignment 74
Polarizer Alignment 75
45-deg HWP Alignment 76
45-deg QWP Alignment 77
Polarization Flipping 78
In-line Beam Steering 79
Cosine Error 80
Cosine Mirror Alignment 81
Mixing and Periodic Error 82
Lissajous Figure 82
Source Mixing 83
Beam Leakage 84
Periodic Error 85
Assessing Periodic Error 86
Quantifying Periodic Error 87
Spatial Fourier Analysis 88
Measurement Errors and Uncertainty 89
Measurement Uncertainty 89
Probability Distributions 90
Combined Uncertainty 91
Uncertainty Sources 92
DMI Measurement Model 93
Source Vacuum Wavelength 94
Refractive Index Uncertainty 95
Cosine Error: Retroreflector Target 96
Cosine Error: Plane Mirror Target 97
Phase Change Uncertainty 98
Abbé Uncertainty 99
Measurement Axis Location 100
Interferometer Thermal Drift 101
Deadpath Uncertainty 102
Periodic Error Uncertainty 103
Table of Contents
ix
Field Guide to Displacement Measuring Interferometry
Surface Figure Error 104
Data Age Uncertainty 105
Error Corrections 106
Air Refractive Index Compensation 107
Error Budget 108
Measurement Uncertainty Example 109
Stage Measurement Uncertainty Example 109
Example Uncertainty Parameters 110
Example Uncertainty Propagation 111
Example Combined Uncertainty 115
Equation Summary 116
Bibliography 125
Index 129
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